MULTIZONE HOLLOW CATHODE DISCHARGE SYSTEM WITH COAXIAL AND AZIMUTHAL SYMMETRY AND WITH CONSISTENT CENTRAL TRIGGER

摘要

Embodiments of the present invention relate to hollow cathode plasma sources with improved uniformity. One embodiment of the present invention provides a hollow cathode assembly having a conductive rod disposed in an inner volume along a central axis of a hollow cathode. The conductive rod being closest to the ground electrode and having the sharpest features of the hollow cathode becomes the point of plasma ignition. Since the conductive rod is positioned along the central axis, the plasma is ignited at symmetrically about the central axis thus improving plasma uniformity and reducing skews.

主权项

1. An electrode for generating a plasma, comprising:
a conductive body having an upper side, a lower side, and a central volume open at the lower side, wherein the conductive body and the central volume is substantially symmetric about a central axis extending from the upper side to the lower side, and a gas channel is formed through the conductive body and open to the central volume; and a conductive rod positioned in the central volume on the central axis, wherein a first end of the conductive rod is coupled to the conductive body and a second end extends out of the central volume beyond the lower side.