发明名称 |
Method for manufacturing surface acoustic wave element |
摘要 |
A method for manufacturing a surface acoustic wave element that prevents curvature of a piezoelectric substrate when forming an electrode pattern includes a first step of bonding to a first principal surface of a piezoelectric substrate a support member having a linear expansion coefficient lower than a linear expansion coefficient of the piezoelectric substrate to form a composite substrate, a second step of forming a plurality of grooves in the support member of the composite substrate from a surface that is opposite to a bonding interface between the support member and the piezoelectric substrate, a third step of forming electrode patterns including at least one IDT electrode on a second principal surface of the piezoelectric substrate of the composite substrate, and a fourth step of dividing the composite substrate on which the electrode patterns are formed to form individual surface acoustic wave elements. |
申请公布号 |
US8689416(B2) |
申请公布日期 |
2014.04.08 |
申请号 |
US20100845849 |
申请日期 |
2010.07.29 |
申请人 |
RYU YOSHIKI;OMURA MASASHI;MURATA MANUFACTURING CO., LTD. |
发明人 |
RYU YOSHIKI;OMURA MASASHI |
分类号 |
H03H3/08;H01L41/053 |
主分类号 |
H03H3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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