| 摘要 |
To provide a flow rate control device which satisfies the desired overshoot amount and a target response time etc. of the flow rate of an actual flowing fluid, regardless of a precondition such as the size of a final target value in a input setting flow rate, the present invention comprises: a setting flow rate trimming unit (41) which outputs a setting flow rate after trimming in which a continuous change section inserted into a discontinuous point in an input setting flow rate when the input setting flow rate having a discontinuous point in which a target value discontinuously time-changed from a first target value (r1) to a second target value (r2) is accepted; and a valve control unit (42) which controls an opening degree of a flow rate control valve (2) so that a deviation between a measuring flow rate and a setting flow rate after trimming becomes smaller. The setting flow rate trimming unit (41) changes a change amount of a target value per unit time in the continuous change section according to the size of the absolute value of a deviation between the first target value (r1) and the second target value (r2) of the accepted input setting flow rate. [Reference numerals] (AA) Setting flow rate; (BB) Continuous change section; (CC) Input setting flow rate; (DD) Setting flow rate after trimming; (EE) Time |
