发明名称 |
METHOD OF MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE |
摘要 |
An impurity of a first conductivity type is implanted onto a silicon carbide substrate (90) through an opening (OP) in a mask layer (31). First and second films (32, 33) made of first and second materials respectively are formed. It is sensed that etching of the first material is performed during anisotropic etching, and then anisotropic etching is stopped. An impurity of a second conductivity type is implanted onto the silicon carbide substrate (90) through the opening (OP) narrowed by the first and second films (32, 33). Thus, the impurity regions can be formed in an accurately self-aligned manner. |
申请公布号 |
KR20140024790(A) |
申请公布日期 |
2014.03.03 |
申请号 |
KR20127026956 |
申请日期 |
2012.01.31 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
YAMADA SHUNSUKE;MASUDA TAKEYOSHI |
分类号 |
H01L21/336;H01L21/3065;H01L29/12 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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