发明名称 SPATIAL LIGHT MODULATING ELEMENT AND EXPOSURE EQUIPMENT
摘要 Provided is a spatial light modulation element comprising a substrate; a reflecting mirror that moves from an initial position relative to the substrate; an elastic member that exerts an elastic force in a direction causing the reflecting mirror to return to the original position; a support body that supports the elastic member; and an elastic support member that elastically supports the support body relative to the substrate. In the spatial light modulation element, the support body may be supported at a distance from a surface of the substrate. The spatial light modulation element may further comprise a connecting portion that connects the support body to the substrate such that the support body can move along a surface direction of the substrate.
申请公布号 KR20140016986(A) 申请公布日期 2014.02.10
申请号 KR20137034129 申请日期 2012.08.23
申请人 NIKON CORPORATION 发明人 SUZUKI YOSHIHIKO
分类号 G02B26/08;G03F7/20;H01L21/027 主分类号 G02B26/08
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