SERVO CONTROL DEVICE AND SERVO CONTROL METHOD

摘要

A servo control device (20) is provided with: a position feedback unit (21) that performs position feedback control for matching the position of a driven part to a position command for each of the X, Y and Z axes; and a speed feedforward unit (22) that performs speed feedforward control for compensating for a delay in position control for the driven part resulting from position feedback control for each axis. The servo control device (20) sets a position loop gain for each axis to the same preconfigured value when speed feedforward control is OFF, and sets the position loop gain resulting from the position feedback control to an optimal gain corresponding to each axis when the speed feedforward control by the speed feedforward unit (22) is ON.