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发明名称
摘要
申请公布号
JP4797274(B2)
申请公布日期
2011.10.19
申请号
JP20010120164
申请日期
2001.04.18
申请人
发明人
分类号
H01L21/265;H01L21/337;H01L21/338;H01L29/808;H01L29/812
主分类号
H01L21/265
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代理人
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