| 摘要 |
PURPOSE: A manufacturing method of a film type probe unit is provided to improve contact performance by separately manufacturing a probe sheet having the same pitch as electrode of a test material. CONSTITUTION: A pattern wiring is formed in an insulating film(221). The pattern wiring is insulated except a contact unit(222a) touching in the electrode of a test material. A driving chip in which the test material is driven is mounted in the insulating film and a probe sheet is manufactured. The probe sheet(220) is fixed to a body block. The driving chip is mounted in a TAB IC attached to a finished product of the test material. |
