MULTI-SPLIT ANODE WALL PLASMA GENERATING DEVICE AND PLASMA TREATING DEVICE

摘要

Disclosed is a multi-split anode wall plasma generating device wherein a short circuit between the cathode and anode is not caused even if deposits adhering to and depositing on the inner wall of the anode by diffusion plasma peel. A plasma treatment device using the same is also disclosed. When the plasma (P) generated between the cathode (2) and the anode (3) is given off forward from the cathode (2) and diffuses, the diffusing substance (41) recrystalizes, adheres to and deposits on the inner wall of an electrode cylinder, and peels as carbon flakes (40). The inner wall of the electrode cylinder is multi-split in a matrix by means of longitudinal and lateral grooves (37, 38). Even if the diffusing plasma adheres to and deposits on the anode (3), the deposits are very small thanks to the deposit separation action of a number of projections (35), and no large deposits and no long deposits are produced. Carbon flakes (40) peel as small pieces from the projections (39) which are of small size, none of the deposits which have peeled extends over and bridges the cathode (2) and the anode (3), and thus a short circuit between both electrodes is prevented.