发明名称 |
VERTICAL TYPE SEMICONDUCTOR MEMORY DEVICE, METHOD FOR MANUFACTURING THE SAME AND METHOD FOR OPERATING THE SAME |
摘要 |
PURPOSE: A vertical type semiconductor memory device, a manufacturing method thereof and an operating method thereof are provided to increase a read sensing margin by expanding a memory window. CONSTITUTION: A substrate includes a first impurity region(104). A single crystal semiconductor pattern is formed on the first impurity region of the substrate and has a second impurity region under the upper surface while having a filler shape. A gate insulating layer structure is formed on the sidewall of the single crystal semiconductor pattern and includes a charge storage pattern(121b). A gate electrode(122a) faces the sidewall of the single-crystal semiconductor pattern and has the upper side which is lower than the semiconductor pattern.
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申请公布号 |
KR20100055874(A) |
申请公布日期 |
2010.05.27 |
申请号 |
KR20080114765 |
申请日期 |
2008.11.18 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SON, YONG HOON;LEE, JONG WOOK;KANG, JONG HYUK |
分类号 |
H01L21/8242;H01L27/108 |
主分类号 |
H01L21/8242 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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