发明名称 Method of manufacturing semiconductor device
摘要 A method of manufacturing a semiconductor device wherein semiconductor elements (e.g., transistors) respectively formed in multiple independent wells have the same characteristics with the number of production process steps being reduced. A P-type well as an area of a first conductivity type is formed on a semiconductor substrate. Then, second and fourth wells as two regions of a second conductivity type are formed apart from each other in the P-type well, and a first buried well of N-type as a first buried region of the second conductivity type to connect the second and fourth wells is formed at the bottom of a third well (part of the area of the first conductivity type) sandwiched between the second and fourth wells. In this way, a triple well is formed on the semiconductor substrate.
申请公布号 US2010093162(A1) 申请公布日期 2010.04.15
申请号 US20090585849 申请日期 2009.09.25
申请人 OKI SEMICONDUCTOR CO., LTD. 发明人 YAKUWA TOMOHIRO
分类号 H01L21/26 主分类号 H01L21/26
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