摘要 |
PROBLEM TO BE SOLVED: To reduce erroneous detection during liquid detection. SOLUTION: This liquid detector has a sensor chip 220 including a piezoelectric element adding vibration to a sensor cavity 222 receiving the liquid. A first hole 212 guiding the liquid to the sensor cavity and a second hole 214 making the liquid flow out of the sensor cavity are formed in a sensor base 210 joined to the sensor chip 220. A detour forming section 139 forming a detour 137 detouring a channel going toward the outlet 135b of a downstream buffer chamber 134b from the second hole is provided in the downstream buffer chamber 134b making the liquid flow out of the second hole stay. The detour prevents air bubbles coming out of the second hole and being liable to linearly go toward the outlet from linearly moving. COPYRIGHT: (C)2010,JPO&INPIT |