| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a retainer ring which can minimize the time required for break-in polishing. <P>SOLUTION: A corner part on the inner peripheral side on the side of a pressing surface 8a and a corner part on the outer peripheral side are formed in an R-shape and the pressing surface 8a is graded from the inner peripheral side to the outer peripheral side. Thus, the shape on the side of the pressing surface 8a of the retainer ring 8 becomes a state similar to the shape of the pressing surface side of the retainer ring with which an appropriate polishing result is obtained, and the shape of the side of the pressing surface 8a becomes appropriate from the beginning. As a result, immediately after mounting the retainer ring 8 or just by performing break-in polishing for a short period of time, the appropriate polishing result is obtained. <P>COPYRIGHT: (C)2009,JPO&INPIT |
