| 摘要 |
PROBLEM TO BE SOLVED: To provide a means enabling dimensional proofreading at a focus position outside a movable range of a sample stage in a light axis direction, in a charged particle beam device equipped with a sample stage of a side entry system. SOLUTION: A sample holder of the side-entry system sample stage of the charged particle beam device has a sample pedestal mounted for a sample for dimensional proofreading. The sample pedestal for the sample for dimensional proofreading is provided with a holder mounting part engaged with a recessed part of the sample holder, a sample sticking part holding the dimensional proofreading sample, and a position adjustment mechanism for relatively moving a position of the dimensional proofreading sample along the light axis direction with respect to the holder mounting part. COPYRIGHT: (C)2008,JPO&INPIT
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