| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and apparatus for measurement by which a position of an aperture stop in an optical system is measured at high accuracy. <P>SOLUTION: A measurement method for measuring the position of the aperture stop in the optical system includes the steps of measuring a light intensity distribution of light that passes the aperture stop, at a position that is optically conjugate with a pupil position in the optical system, and determining a position of the aperture stop in the optical system based on a diffraction fringe of the light intensity distribution measured by the measuring step. <P>COPYRIGHT: (C)2008,JPO&INPIT |
