发明名称 |
Preparation of Organosilane Esters |
摘要 |
The present invention relates to a specific process for preparing organosilane esters of the formula (I) and a composition comprising more than 98% by weight of organosilane esters of the formula (I) and less than 2.0% by weight of at least one hydrocarbon and to the use of such a composition as precursor for producing a layer or film having a dielectric constant of 1<kappa<=4.
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申请公布号 |
US2007249785(A1) |
申请公布日期 |
2007.10.25 |
申请号 |
US20050569585 |
申请日期 |
2005.04.04 |
申请人 |
MUH EKKEHARD;RAULEDER HARTWIG;KLEIN HARALD |
发明人 |
MUH EKKEHARD;RAULEDER HARTWIG;KLEIN HARALD |
分类号 |
C07F7/18 |
主分类号 |
C07F7/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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