发明名称 |
MESO-MICROELECTROMECHANICAL SYSTEM HAVING A GLASS BEAM AND METHOD FOR ITS FABRICATION |
摘要 |
A meso-electromechanical system (900, 1100) includes a substrate (215), a standoff (405, 1160) disposed on a surface of the substrate, a first electrostatic pattern (205, 1105, 1110, 1115, 1120) disposed on the surface of the substrate, and a glass beam (810). The glass beam (810) has a fixed region (820) attached to the standoff and has a second electrostatic pattern (815, 1205, 1210, 1215, 1220) on a cantilevered location of the glass beam. The second electrostatic pattern is substantially co-extensive with and parallel to the first electrostatic pattern. The second electrostatic pattern has a relaxed separation (925) from the first electrostatic pattern when the first and second electrostatic patterns are in a non-energized state. In some embodiments, a mirror is formed by the electrostatic materials that form the second electrostatic pattern. The glass beam may be patterned using sandblasting (140). |
申请公布号 |
WO2005062950(A2) |
申请公布日期 |
2005.07.14 |
申请号 |
WO2004US43415 |
申请日期 |
2004.12.22 |
申请人 |
MOTOROLA, INC.;SAVIC, JOVICA;ELIACIN, MANES,;LIU, JUNHUA,;TUNGARE, AROON V., |
发明人 |
SAVIC, JOVICA;ELIACIN, MANES,;LIU, JUNHUA,;TUNGARE, AROON V., |
分类号 |
G02B26/08;G02B26/10;H01H57/00;H02N1/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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