MULTI-FACE FORMING MASK DEVICE FOR VACUUM DEPOSITION

摘要

A second metal mask (13) having a reed screen part (13A) with a large number of fine slits (13a) arranged parallel with each other at very small intervals is disposed on a base plate (12) commonly used as a first metal mask having a number of windows (18) for restricting a deposition area. One end of the second metal mask (13) is fixed to the base plate (12) with a mask clamp (20) and the other end is fixed to a slider (23) by compression coil springs (30) to give a tension to the reed screen part (13A) of the second metal mask so as to maintain the slits (13a) in a straight state at specified pitches. Ultra fine patterns can be formed on the multiple faces of a substrate (17) by disposing the substrate (17) on the second metal mask (13) and performing deposition.