DISCHARGE INSPECTION METHOD AND DISCHARGE INSPECTING APPARATUS OF DROPLET DISCHARGE HEAD IN ORGANIC EL DEVICE MANUFACTURING APPARATUS, ORGANIC EL DEVICE MANUFACTURING APPARATUS, ORGANIC EL DEVICE AND ITS MANUFACTURING METHOD, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a discharge inspection method and a discharge inspecting apparatus of a droplet discharge head in an organic EL device manufacturing apparatus, capable of simply inspecting the discharge state of the droplet discharge head in the organic EL device manufacturing apparatus and improving yields in an organic EL device, the organic EL device manufacturing apparatus, the organic EL device, a manufacturing method of the organic EL device, and electronic equipment. SOLUTION: In the discharge inspection method for the droplet discharge head in the organic EL device manufacturing apparatus, the decision for droplets discharged from each nozzle 49 of the droplet discharge head 31 and in the middle of flying are irradiated by a stroboscope 121 and are imaged; the imaged result subjected to image recognition; and it is decided whether the discharge of each nozzle 49 is being conducted normally. COPYRIGHT: (C)2004,JPO