发明名称 Process for stripping color filter arrays from substrates
摘要 Ozone is used to reduce color filter material, previously deposited on substrates containing electronic sensors, to an ash that can easily be removed by rinsing with water, allowing the substrate to be reused.
申请公布号 US2002074015(A1) 申请公布日期 2002.06.20
申请号 US20000738732 申请日期 2000.12.15
申请人 GRIMSLEY THOMAS J. 发明人 GRIMSLEY THOMAS J.
分类号 B08B7/00;G03F7/42;H01L31/18;(IPC1-7):B08B3/12;B08B7/04 主分类号 B08B7/00
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