SYSTEM FOR SUPPLYING CLEANING LIQUID

摘要

PURPOSE: To provide a cleaning liquid supplying system for suitably exhausting a cleaning liquid while using it carefully. CONSTITUTION: The cleaning liquid used in a first cleaning station is sent to a spent liquid tank 2 through a sending pipe 12. The spent cleaning liquid in the tank 2 is sent to a second cleaning station through a supply pipe 21 and used for cleaning the edge part of a substrate or the inside of a cup. The cleaning liquid used in the second cleaning station is sent to another spent liquid tank 3 through a return pipe 30 and a pipe 32 branched from the pipe 30 and recovered.