OPTICAL ELEMENT HOLDING DEVICE, LENS BARREL, EXPOSURE DEVICE, AND MANUFACTURING METHOD OF MICRODEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical element holding device capable of attaining a compact lens barrel, and also, capable of highly accurately driving an optical element positioned near the intermediate part of the lens barrel. SOLUTION: The device is provided with an inner ring part 44a for holding a movable lens 38a being engaged with the circumferential edge of the movable lens 38a, and an outer ring part 44b which is connected to the inner ring part 44a. The outer ring part 44b and the inner ring part 44a are integrally formed, and also, the outer ring part 44b is arranged outside the inner ring part 44a. The inner ring part 44a and the outer ring part 44b are connected together so that they may be relatively moved almost along the optical axis of the movable lens 38a based on the displacement of an actuator 50.