| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum/gas leakage-detecting apparatus which can surely detect degree of a leakage and lost parts by simple devices for the leakage of a minute amount irrespective of a type of gases in an apparatus piping line of an unspecified object to be inspected. SOLUTION: This vacuum/gas leakage-detecting apparatus utilizing a metallic thin film comprises the fixedly supported metallic thin film 3 for acting to a suction force/jet force of the vacuum/gas leakage, a laser irradiation means 11 to the metallic thin film for detecting a distortion of the metallic thin film, a photodetector for detecting a change of a laser reflecting light and an output meter 23 with a detecting lamp 24. The degree of the leakage and lost parts of the apparatus piping line of the unspecified object to be inspected can be surely detected from an optical output indication of the output meter and the detecting lamp, by surveying along the apparatus piping line the metallic thin film part operating as a sensor.
|
