DEAIRED STORING/FILLING SYSTEM FOR PERFLUOROCARBON

摘要

PROBLEM TO BE SOLVED: To provide a system for storing/filling perfluorocarbon while deaerating. SOLUTION: This system comprises a tank 1 for deaerating perfluorocarbon liquid, a tank 2 for storing deaerated perfluorocarbon disposed lower than the deaerating tank 1, and piping 8 for interconnecting the storage tank 2 and the deaerating tank 1. The storage tank 2 is partitioned into upper and lower chambers 12, 13 by means of a flexible member 11 wherein perfluorocarbon liquid is stored in the upper chamber 12 and an inner pressure regulator 7 is coupled with the lower chamber 13. At the time of introducing deaerated perfluorocarbon from the deaerating tank 1 to the upper chamber 12 of the storage tank through the interconnecting piping 8, pressure in the lower chamber 13 is set lower than the vapor pressure of perfluorocarbon liquid by means of the pressure regulator 7.