| 摘要 |
PROBLEM TO BE SOLVED: To prevent the deformation of a vibration resistant base or to control the pressure so that the deforming state is not transited, by extracting a component which deforms only the vibration resistant base without relating to the attitude control and the vibration damping control from the air spring pressure. SOLUTION: A pressure target value output device 8 outputs the pressure target values of the air springs 2a-2d to keep a vibration resistant base 7 in a target attitude. The signals of the pressure sensors 4a-4d are respectively subtracted from the pressure target values to determine the difference signals. The difference signals include a deforming component for deforming the vibration resistant base 7. A deforming component extracting device 9 outputs the deforming component pressure on the basis of the result of the calculation for subtracting the singals of the pressure sensors 4a-4d from the pressure target values. A proper compensator 10 is acted on the pressure, whereby a deforming component pressure distribution unit 11 controls the pressure of the air springs 2a-2d through the power amplifiers 12a-12d and the air valves 3a-3d to make the deforming component pressure zero. Whereby the attitude control, the vibration damping control and the pressure control can be simultaneously executed. |
