EXPOSURE DEVICE,申请号JP19970053971-传众专利搜索

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发明名称	EXPOSURE DEVICE
摘要
申请公布号	JPH10232497(A)	申请公布日期	1998.09.02
申请号	JP19970053971	申请日期	1997.02.20
申请人	NIKON CORP	发明人	ITO YOSHINOBU
分类号	G03B27/32;G03F7/20;H01L21/027;(IPC1-7):G03F7/20	主分类号	G03B27/32
代理机构		代理人
主权项
地址

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