| 摘要 |
PROBLEM TO BE SOLVED: To prevent damage of a wafer slice during its storage/extracting to/from a carrier box for a wafer slice. SOLUTION: A elevating table 6 carrying a carrier box 1, in which slits 3 for housing a wafer slice 4 are constructed in multiple levels, and a fork 10, which can be moved in the horizontal/vertical direction so as to hold the wafer slice 4 by vacuum suction, are provided, and the fork 10 is moved forward/backward to/from the carrier box 1 while floating the wafer slice 4 in the slit 3, so that the wafer slice 4 is prevented from being scratched by the slit 3 and is not damaged. |
