| 摘要 |
Apparatus for locking a workpiece, such as a compact disc, in a vacuum chamber includes a locking mechanism, movable between a locked position and an unlocked position, and a sealed bellows assembly that is coupled to the locking mechanism. The locking mechanism is automatically actuated by the bellows assembly between the locked and unlocked positions when the pressure in the chamber is changed by a predetermined amount. The locking apparatus is preferably used for locking the compact disc to a disc holder during processing and/or handling.
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