| 摘要 |
PURPOSE:To eliminate the trouble that the pseudo defects are generated continuously, when a reticle pattern is inspected, by cutting off the angular part of the pattern which is outputted from a magnetic tape and forms standard, in pseudo form. CONSTITUTION:The transmission light which transmits through a reticle pattern formed on a glass substrate by the photographic erosion method is converted into the image signal by using an image signal conversion circuit 21, and displayed on a monitor TV 22. While, the signal which is used in designing and sent out from a magnetic tape 23 is converted into the image signal by an image signal conversion circuit 24, and corrected by using an image correcting circuit 25 before being inputted into a monitor TV 26. Accordingly, the angular part of the reticle pattern which is sent out from the magnetic tape 23 and forms a standard is cut off in pseudo form, and the inspection signal is corrected. The image signal supplied from the image signal conversion circuit 21 and the corrected inspection signal supplied from the image signal correcting circuit 25 are compared in a comparison collation circuit 27, and the defect of the reticle pattern is detected. |
