| 摘要 |
PURPOSE:To provide AlN powder having a specified particle size distribution and an oxygen content below a specified value and providing a base plate having high heat conductivity by crushing a nitrided ingot obtd. by a direct nitriding process under control, or classifying the nitrided ingot. CONSTITUTION:An AlN ingot prepd. by the direct nitriding process is crushed under control, or crushed by jet grinding, etc. retarding generation of fine powder, or classifying a crushed product. Thus, AlN powder prepd. by the direct nitriding, having <=1.5wt.% oxygen content, contg. <10vol.% particles having <=1mum particle size and <30vol.% particles having >=10mum particle size is obtd. Since the AlN powder contains only small amt. of fine powder, a sintered product prepd. by molding and then sintering the powder has high heat conductivity, and a sintered body suitable for a material for heat radiating base plate, etc., is obtd. |
