| 摘要 |
PURPOSE:To obtain a substrate attracting structure capable of corresponding to a plurality of pieces of substrates different in size by one piece of a substrate holding plate by a method wherein a plurality of attracting parts fitted to a plurality of sizes are formed on one piece of the substrate holding plate. CONSTITUTION:Annular attracting grooves 3A-3C fitted to substrates 1A-1C are formed on the upper surface of a substrate holding plate 2. Suction parts 4A-4C are connected to a vacuum pump 8 through a connecting pipe 7 by connecting pipes 6A-6C. Moreover, the pipes 6A-6C are respectively provided with ON-OFF valves 9A-9C, which can be opened and shut. Thereby, a plurality of the substrates 1A-1C different in size can be attracted by one piece of the plate 2 and as the valves 9A-9C simply have only to be opened and shut, a cost reduction in a device and a time reduction in a change-over work are contrived. |
