发明名称 THIN FILM TRANSISTOR MATRIX SUBSTRATE AND ITS MANUFACTURE
摘要 <p>PURPOSE: To make possible reducing the number of masks at the time of manufacturing, without generating a leak current between a source and a drain, and realizing simplification of manufacturing process and stabilization of TFT characteristics. CONSTITUTION: An operating semiconductor layer 6 composed of amorphous silicon, a gate insulating film 7 and a gate electrode 8G wherein a planar pattern exists inside as compared with a planar pattern of the operating semiconductor layer 6 are laminated on an insulating substrate 1. At least a part or all the part of a protruding part from the gate electrode 8G of the operating semiconductor layer 6 is constituted of a thin film transistor which is changed into different one from the operating semiconductor layer 6.</p>
申请公布号 JPH08107212(A) 申请公布日期 1996.04.23
申请号 JP19940242807 申请日期 1994.10.06
申请人 FUJITSU LTD 发明人 TAKEUCHI FUMIYO;TAKIZAWA YUTAKA;OGATA HIROSHI;TANAKA TSUTOMU;YANAI KENICHI
分类号 G02F1/136;G02F1/1368;H01L21/336;H01L29/786;(IPC1-7):H01L29/786 主分类号 G02F1/136
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