METHOD AND APPARATUS FOR MANUFACTURING HIGH-PURITY SILICON RODS

摘要

A method of manufacturing high-purity silicon rods by subjecting a silicon compound to pyrolysis on a plurality of rodshaped high-purity silicon carrier members which have been redheated by directly passing an electric current therethrough thereby depositing high-purity silicon thereon, characterized in that monosilane supplied into a pyrolysis container is subjected to pyrolysis or thermal decomposition on said red-heated carrier members while insulating the radiant heat between said red-heated carrier members along the overall length thereof.