发明名称 |
Thin film capacitor and apparatus for manufacturing same |
摘要 |
A thin film capacitor composed of a hybrid dielectric thin film that is sandwiched by a pair of electrodes. The hybrid dielectric thin film is obtained by complexing or accumulating first and second regions. The first region is derived from an ion plating source and the second region is derived from another ion plating source containing an auxiliary material to be coupled with the first region, both being obtained through an ion plating process. The use of the auxiliary material ensures a pinhole-free hybrid dielectric thin film.
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申请公布号 |
US5258886(A) |
申请公布日期 |
1993.11.02 |
申请号 |
US19920900372 |
申请日期 |
1992.06.18 |
申请人 |
C. ITOH FINE CHEMICAL CO., LTD.;MURAYAMA, YOICHI |
发明人 |
MURAYAMA, YOICHI;KASHIWAGI, KUNIHIRO;YOSHIDA, YASUHIKO |
分类号 |
H01B3/00;H01G4/18;H01G4/20;H01G4/33;(IPC1-7):H01G4/10;H01G4/12;H01G7/00 |
主分类号 |
H01B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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