| 摘要 |
PROBLEM TO BE SOLVED: To obtain a detergent composition which is effective in cleaning a pad, such as a polishing pad dirtied by solid dirt in a polishing liquid, by using an anionic surfactant. SOLUTION: Preferably, the anionic surfactant is a compound containing at least five of at least one kind of groups selected from among -COOR and -SO3R (wherein R is H or an inorganic or organic group) groups and having a solubility (at 25 deg.C) of 0.05 g or higher in 100 g water and a mol.wt. of 500-300,000. The surfactant may be used as it is or as an aqueous solution preferably with a concentration of 0.01-95 wt.%. When a chelating agent is compounded, the detergency against solid dirt is improved. Preferably, the pH of the composition is 2-13. Still preferably, a nonionic surfactant having a 1-20C linear or cyclic saturated or unsaturated hydrocarbon group and a polyoxyalkylene alkyl oxide group is compounded. |
