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发明名称
摘要
申请公布号
JP2540912(B2)
申请公布日期
1996.10.09
申请号
JP19880128845
申请日期
1988.05.25
申请人
发明人
分类号
H01L29/73;H01L21/331;H01L29/72;H01L29/732;(IPC1-7):H01L21/331
主分类号
H01L29/73
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