| 发明名称 |
ORGANIC LIGHT-EMITTING DISPLAY APPARATUS |
| 摘要 |
A method of manufacturing a polysilicon (poly-Si) layer, a method of manufacturing an organic light-emitting display apparatus using the method, and an organic light-emitting display apparatus manufactured by using the method. The method includes forming an amorphous silicon (a-Si) layer on a substrate having first and second areas, thermally treating the a-Si layer to partially crystallize the a-Si layer into a partially crystallized Si layer, removing a thermal oxide layer through a thermal treatment, selectively irradiating the first areas with laser beams to crystallize the partially crystallized Si layer. |
| 申请公布号 |
US2016013055(A1) |
申请公布日期 |
2016.01.14 |
| 申请号 |
US201514864402 |
申请日期 |
2015.09.24 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
Moon Sang-Ho;Huh Jong-Moo;Kim Sung-Ho |
| 分类号 |
H01L21/02;H01L21/311 |
主分类号 |
H01L21/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing a polysilicon (poly-Si) layer, the method comprising:
forming an amorphous silicon (a-Si) layer on a substrate, the substrate having a first area and a second area; thermally treating the a-Si layer to convert the a-Si layer into a partially crystallized Si layer; removing a thermal oxide layer formed by the thermally treating of the a-Si layer; and selectively irradiating the first area with laser beams to crystallize the partially crystallized Si layer. |
| 地址 |
Yongin-Si KR |
