Method of manufacturing pixel walls of an electrowetting display device

摘要

A method of manufacturing an electrowetting display device includes a preliminary partition wall pattern formed on a lower substrate on which a pixel electrode of an oxide series and an insulation layer are formed. The preliminary partition wall pattern is disposed along a boundary of the pixel electrode. A water-repellent layer including a self-assembled monolayer having a hydrophobic property is formed on the lower substrate. A portion of the preliminary partition wall pattern and the water-repellent layer formed on the preliminary partition wall pattern are removed to form a partition wall pattern on the insulation layer and to form a water-repellent pattern on the pixel electrode and the insulation layer between partition walls of the partition wall patterns. A fluid layer is formed on the lower substrate on which the water-repellent pattern is formed. The lower substrate and an upper substrate are combined with each other.

主权项

1. A method of manufacturing an electrowetting display device, the method comprising:
forming a preliminary partition wall pattern on a lower substrate on which a pixel electrode and an insulation layer are formed, wherein the preliminary partition wall pattern is disposed along a boundary of the pixel electrode; forming a water-repellent layer on the preliminary partition wall pattern, the pixel electrode, and the insulation layer, wherein the water-repellent layer comprises a self-assembled monolayer having a hydrophobic property; removing a portion of the preliminary partition wall pattern and the water-repellent layer formed on the preliminary partition wall pattern, and forming a partition wall pattern on the insulation layer; forming a water-repellent pattern on the insulation layer and the pixel electrode between partition walls of the partition wall pattern, wherein removing the portion of the preliminary partition wall pattern results in a portion of the partition wall pattern above the water-repellant pattern that is narrower than a portion of the partition wall pattern below the water-repellant pattern; forming a fluid layer on the lower substrate on which the water-repellent pattern is formed; and combining the lower substrate with an upper substrate.