发明名称 POSITIONING DEVICE, MICROSCOPE SYSTEM AND ATTACHED MATERIAL REMOVING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To enable a drive characteristic of an ultrasonic motor to be stably maintained.SOLUTION: A positioning device 1 comprises: a base 2; a movement part 3 that is movably attached to the base 2; ultrasonic motors 41x and 41y that are attached to the base 2, and generate an ultrasonic oscillation to thereby move the movement part 3 relatively to the base 2; and a movement control unit 303 that actuates the ultrasonic motors 41x and 41y to thereby move the movement part 3 relatively to the base 2, and repeatedly perform a positioning operation of sequentially positioning the movement part 3 at a plurality of setting positions. The movement control unit 303 is configured to relatively move the movement part 3 to the base 2 so as to pass at least one of a first outside setting position in which a separation distance among the setting positions is maximum and a second outside setting position therein, out of the plurality of setting positions.</p>
申请公布号 JP2015099195(A) 申请公布日期 2015.05.28
申请号 JP20130238028 申请日期 2013.11.18
申请人 OLYMPUS CORP 发明人 IWASAKI SUNAO
分类号 G02B21/26 主分类号 G02B21/26
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