| 摘要 |
Semiconductor device test equipment (1A) includes: a tester unit (16) for generating an operation pulse signal, an optical sensor (10) for outputting a detection signal in response to the operation pulse signal, a pulse generator (17) generating a reference signal, including multiple harmonics to operation pulse signal, in synchronization with the operation pulse signal, a spectrum analyzer (13) for receiving detection signals and obtaining the phase and amplitude of the detection signal at the detection frequency, a spectrum analyzer (14) for receiving the reference signal and obtaining the phase of the reference signal at the detection frequency, and an interpretation controller (18) for obtaining a time waveform of the detection signal based on the phase and amplitude of the detection signal obtained by the spectrum analyzer (13) and the phase of the reference signal obtained by the spectrum analyzer (14). |
