METHOD AND DEVICE FOR INSPECTING SUBSTRATE SURFACE DEFECT

摘要

PROBLEM TO BE SOLVED: To provide a method and device for inspecting a surface defect of a substrate.SOLUTION: A method for detecting surface defects such as a slip line occurring on a substrate to be applied to electronics, optoelectronics or analogue devices comprises at least the steps of: projecting a pattern 3 composed of a light fringe 4 and a dark band 5 in a stripe pattern onto a substrate, and reflecting the fringe by a surface of a substrate 2; relatively displacing the pattern 3 and the substrate along at least one direction, and displacing the fringe 4 of the pattern 3 on the substrate; acquiring at least three sequenced images of the pattern 3 reflected by the substrate in the accordance with displacement of the fringe 4 by use of a light reception sensor; measuring a gradient angle of the substrate surface, utilizing the displacement of the fringe 4 of the pattern 3; and determining presence/absence of the surface defect of the substrate by using a variation of the gradient angle of the substrate surface.