| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for forming an organic molecule film high in the degree of freedom of an object to be processed which can be targeted for processing thereby, and in the degree of freedom of the characteristic of a film surface to form an organic molecule film on; and a method of forming an organic molecule film.SOLUTION: An apparatus 100 for forming an organic molecule film on an object to be processed comprises: a process chamber 11 into which an object to be processed is loaded; an organic material gas supply part 2 for supplying an organic material gas into the process chamber 11; and an ultraviolet light-irradiation part 13 for irradiating, of the object to be processed, the organic material gas supplied to the object to be processed, and a film formed on a surface of the object to be processed, one to three objects with ultraviolet light. The ultraviolet light-irradiation part 13 irradiates one to three objects of the object to be processed, the organic material gas supplied to the object to be processed, and a film formed on a surface of the object to be processed with ultraviolet light, thereby activating the surface of the object to be processed and/or the formed organic molecule film. |
