Abscissa calibration jig and abscissa calibration method of laser interference measuring apparatus

摘要

An abscissa calibration jig of a laser interference measuring apparatus, includes: an image projection unit configured to project an image with a marker; a first support mechanism configured to rotatably support the image projection unit around a first rotation axis passing a predetermined rotation center; and a second support mechanism configured to rotatably support the first support mechanism around a second rotation axis crossing the first rotation axis at the rotation center.

主权项

1. An abscissa calibration jig of a laser interference measuring apparatus, comprising:
a spherical reflector configured to project an image with a marker, the spherical reflector including a non-reflective region forming the marker in a surface of the spherical reflector; a first support configured to rotatably support the spherical reflector and rotate around a first rotation axis passing a predetermined rotation center of the spherical reflector; and a second support configured to rotatably support the first support and rotate around a second rotation axis crossing the first rotation axis at the rotation center of the spherical reflector, wherein the spherical reflector uses the rotation center as a center of curvature.