Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

摘要

A piezoelectric element comprises a first electrode including platinum, a piezoelectric layer disposed above the first electrode, made of a complex oxide having a perovskite structure containing at least bismuth, and a second electrode disposed above the piezoelectric layer. An oxide containing bismuth and platinum is disposed at the interface of the piezoelectric layer with the first electrode.

主权项

1. A piezoelectric element comprising:
a first electrode including platinum; a piezoelectric layer disposed above the first electrode, the piezoelectric layer being made of a complex oxide having a perovskite structure containing at least bismuth; and a second electrode disposed above the piezoelectric layer, wherein another oxide containing bismuth and platinum is disposed at the interface of the piezoelectric layer with the first electrode, the another oxide containing bismuth and platinum being formed at an interface between the first electrode and the piezoelectric layer as a plurality of spaced apart islands.