| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved apparatus and method for delivering, with prompter throughput, an article comprised of a plurality of portions such as a semiconductor container in a container processing system for e.g., container cleaners.SOLUTION: An apparatus and a method are disclosed for delivering a substrate container in a container processing system for e.g., container cleaners. Movement of various containers is combined with integrated movement handled by a robot. For example, the integrated robot movement includes: taking up a sealed container from an input load port or from an intermediate station within a cleaner system; moving a cover and a main body together; and then separately disposing the cover and the main body at suitable positions, in the cleaner, for cleaning. The integrated movement may also include unlocking the cover and/or separating the cover from the main body during delivery from the load port to the cleaning position. Further, the integrated movement may also include rotating the sealed container for other operation such as e.g., unlocking or separating the cover. |
