METHOD FOR PRODUCING SUBSTRATE HAVING TRANSPARENT CONDUCTIVE FILM ATTACHED THERETO, AND INJECTOR AND DEVICE USED THEREIN

摘要

The problem of stably forming a high-quality tin oxide film on a glass substrate is solved by: using tin tetrachloride and water vapor as starting materials; using the type of injector in which the gas flows of the tin tetrachloride and of the water vapor intersect; setting the gas flow speed of the tin tetrachloride expelled from the injector to 60-150 cm/s; setting the amount of tin tetrachloride to be supplied to 0.3-2.5 vol% of the total volume, as a volumetric percentage compared to the amount of the starting material gas to be supplied; and forming a tin oxide film on a glass substrate.