IMAGING OPTICS

摘要

An imaging optics (7) has a plurality of mirrors (M3; M5, M6, M8) which reflect imaging light (3) and thus image an object field in an object plane into an image field in an image plane. A mirror body (22) of at least one of the mirrors (M8) has a through-opening (21) for the imaging light (3) to pass through. The through-opening (21) has an internal region (23) of a smallest opening width in the mirror body (22). The through-opening (21) expands from the internal region (23) towards both edge regions (24, 25) of the mirror body (22). As a result, an imaging optics is obtained where a disturbing influence of unused light portions is reduced or eliminated completely.