摘要 |
PROBLEM TO BE SOLVED: To solve the problem that fall-down and chipping of piezoelectric element columns is caused upon formation of the plurality of piezoelectric element columns by groove processing in a piezoelectric element member along with an increase in the length of a head. SOLUTION: The plurality of piezoelectric element columns 12A and 12B are formed by grooves 14 in the piezoelectric element member 12. Metal foil 41 is joined with an individual electrode provided on an end face of the piezoelectric element column 12A. An electrode 42 of a FPC 15 for applying a drive signal to the piezoelectric element column 12A is joined and connected with the metal foil 41. Therefore, when the piezoelectric element member 12 is subjected to groove processing, the member is reinforced by the metal foil 41, and the fall-down and chipping of the piezoelectric element columns 12A caused by the groove processing is prevented from occurring. COPYRIGHT: (C)2010,JPO&INPIT |