| 摘要 |
PURPOSE: A metal sputtering target in which a flange is strengthened with the strain hardening is provided to securely connect a metal sputtering target to a sputtering apparatus. CONSTITUTION: A metal sputtering target in which a flange is strengthened with the strain hardening comprises a main body(21) and a flange(22). A joint hole(23) is formed on the flange. The shape of the flange part of the sputtering target is formed roughly. After the strain hardening is raised in the flange part, the cutting process is performed. |
