METHOD TO INCREASE THE COMPRESSIVE STRESS OF PECVD SILICON NITRIDE FILMS,申请号KR20077024729-传众专利搜索

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发明名称	METHOD TO INCREASE THE COMPRESSIVE STRESS OF PECVD SILICON NITRIDE FILMS
摘要
申请公布号	KR100950623(B1)	申请公布日期	2010.04.01
申请号	KR20077024729	申请日期	2006.05.18
申请人		发明人
分类号	H01L21/314;H01L21/205;H01L21/318;H01L21/8238	主分类号	H01L21/314
代理机构		代理人
主权项
地址

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